> Return to SRD 134, Index of Semiconductor Process Gases
|
CARBON
DIOXIDE
|
M.W. [1]
44.010
|
N.B.P [1]
194.75 K
|
T.P [1]
216.59 K
|
|
CO2
|
Pc [1]
7.3773 MPa
|
Tc [1]
304.13 K
|
Vc[1]
0.094118 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,† Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
<1%
|
-
|
Densities calculated should be good to 0.5% away from coexistence curve.
|
0.5%
|
5%
|
|
Reference
|
1
|
-
|
1
|
1
|
1
|
1
|
1
|
1
|
|
220
|
4.011
|
-
|
-247.59
|
584.1
|
5239.6
|
-
|
10.84
|
11.05
|
|
230
|
4.070
|
-
|
-223.09
|
519.7
|
5505.0
|
-
|
11.50
|
11.56
|
|
240
|
4.130
|
-
|
-202.13
|
466.5
|
5575.4
|
-
|
12.19
|
12.06
|
|
250
|
4.190
|
-
|
-184.02
|
422.0
|
5528.1
|
-
|
12.90
|
12.56
|
|
260
|
4.249
|
-
|
-168.22
|
384.3
|
5411.3
|
-
|
13.63
|
13.05
|
|
270
|
4.308
|
-
|
-154.33
|
352.1
|
5255.4
|
-
|
14.38
|
13.55
|
|
280
|
4.365
|
-
|
-142.04
|
324.4
|
5079.8
|
-
|
15.16
|
14.04
|
|
290
|
4.422
|
-
|
-131.09
|
300.3
|
4896.5
|
-
|
15.95
|
14.53
|
|
300
|
4.477
|
-
|
-121.27
|
279.1
|
4713.1
|
-
|
16.75
|
15.01
|
|
310
|
4.532
|
-
|
-112.43
|
260.5
|
4533.9
|
-
|
17.56
|
15.50
|
|
320
|
4.585
|
-
|
-104.42
|
244.1
|
4361.5
|
-
|
18.38
|
15.98
|
|
330
|
4.637
|
-
|
-97.14
|
229.4
|
4197.6
|
-
|
19.21
|
16.45
|
|
340
|
4.688
|
-
|
-90.50
|
216.2
|
4043.0
|
-
|
20.05
|
16.93
|
|
350
|
4.738
|
-
|
-84.40
|
204.3
|
3897.7
|
-
|
20.89
|
17.40
|
|
360
|
4.787
|
-
|
-78.80
|
193.6
|
3761.6
|
-
|
21.73
|
17.86
|
|
370
|
4.834
|
-
|
-73.63
|
183.9
|
3634.2
|
-
|
22.57
|
18.32
|
|
380
|
4.881
|
-
|
-68.84
|
175.0
|
3515.3
|
-
|
23.42
|
18.78
|
|
390
|
4.927
|
-
|
-64.40
|
166.9
|
3404.2
|
-
|
24.27
|
19.24
|
|
400
|
4.971
|
-
|
-60.27
|
159.5
|
3300.4
|
-
|
25.11
|
19.69
|
|
410
|
5.015
|
-
|
-56.42
|
152.7
|
3203.4
|
-
|
25.96
|
20.14
|
|
420
|
5.058
|
-
|
-52.81
|
146.4
|
3112.7
|
-
|
26.80
|
20.58
|
|
430
|
5.099
|
-
|
-49.44
|
140.5
|
3027.8
|
-
|
27.64
|
21.02
|
|
440
|
5.140
|
-
|
-46.27
|
135.1
|
2948.3
|
-
|
28.48
|
21.46
|
|
450
|
5.180
|
-
|
-43.29
|
130.1
|
2873.8
|
-
|
29.32
|
21.90
|
|
460
|
5.219
|
-
|
-40.49
|
125.4
|
2803.8
|
-
|
30.15
|
22.33
|
|
470
|
5.258
|
-
|
-37.84
|
121.0
|
2738.1
|
-
|
30.98
|
22.75
|
|
480
|
5.295
|
-
|
-35.34
|
116.9
|
2676.2
|
-
|
31.81
|
23.18
|
|
490
|
5.332
|
-
|
-32.97
|
113.0
|
2617.9
|
-
|
32.64
|
23.60
|
|
500
|
5.368
|
-
|
-30.72
|
109.4
|
2562.9
|
-
|
33.47
|
24.01
|
|
550
|
5.538
|
-
|
-21.04
|
94.1
|
2329.5
|
-
|
37.54
|
26.04
|
|
600
|
5.692
|
-
|
-13.37
|
82.5
|
2148.9
|
-
|
41.53
|
28.00
|
|
650
|
5.833
|
-
|
-7.15
|
73.3
|
2005.3
|
-
|
45.45
|
29.87
|
|
700
|
5.962
|
-
|
-2.00
|
365.8
|
1888.4
|
-
|
49.28
|
31.67
|
|
750
|
6.079
|
-
|
2.32
|
59.6
|
1791.0
|
-
|
53.03
|
33.41
|
|
800
|
6.187
|
-
|
6.00
|
54.5
|
1708.5
|
-
|
56.69
|
35.09
|
|
850
|
6.285
|
-
|
9.16
|
50.0
|
1637.5
|
-
|
60.28
|
36.70
|
|
900
|
6.375
|
-
|
11.92
|
46.2
|
1575.4
|
-
|
63.79
|
38.27
|
|
950
|
6.457
|
-
|
14.32
|
42.9
|
1520.5
|
-
|
67.21
|
39.79
|
|
1000
|
6.532
|
-
|
16.45
|
40.0
|
1471.5
|
-
|
70.56
|
41.26
|
References:
- Lemmon, E.W., and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0 Beta, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE - Other colors are used to distinguish between differing data sets within a single column.
Contacts:
John Hurly
301-975-2476 Telephone
john.hurly@nist.gov
Keith Gillis
301-975-2468
keith.gillis@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
