> Return to SRD 134, Index of Semiconductor Process Gases
|
NITROGEN
TRIFLUORIDE
|
M.W. [1]
71.019
|
N.B.P [1]
144.14 K
|
T.P [1]
66.36 K
|
|
NF3
|
Pc [1]
4.4607 MPa
|
Tc [1]
234.00 K
|
Vc [1]
0.126263 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
MPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
0.1%/5%
|
-
|
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
-
|
0.5%/-
|
|
Reference
|
1/2
|
-
|
1
|
1
|
1
|
1
|
1
|
1/3
|
|
200
|
5.15
|
-
|
-200.3
|
401.9
|
4067
|
23719
|
10.50
|
11.70
|
|
210
|
5.29
|
-
|
-181.6
|
367.7
|
5011
|
15370
|
11.29
|
12.28
|
|
220
|
5.42
|
-
|
-165.2
|
338.5
|
5581
|
9444
|
12.10
|
12.84
|
|
230
|
5.56
|
-
|
-150.7
|
313.2
|
5902
|
5206
|
12.92
|
13.40
|
|
240
|
5.69
|
-
|
-137.8
|
291.2
|
6056
|
2163
|
13.76
|
13.95
|
|
250
|
5.82
|
-
|
-126.3
|
271.9
|
6097
|
-26
|
14.62
|
14.49
|
|
260
|
5.95
|
-
|
-116.0
|
254.7
|
6064
|
-1596
|
15.48
|
15.02
|
|
270
|
6.08
|
-
|
-106.7
|
239.5
|
5982
|
-2714
|
16.36
|
15.56
|
|
280
|
6.21
|
-
|
-98.2
|
225.9
|
5868
|
-3500
|
17.24
|
16.08
|
|
290
|
6.33
|
-
|
-90.5
|
213.6
|
5735
|
-4040
|
18.12
|
16.60
|
|
300
|
6.45
|
-
|
-83.5
|
202.6
|
5592
|
-4398
|
19.02
|
17.11
|
|
310
|
6.57
|
-
|
-77.0
|
192.5
|
5443
|
-4619
|
19.91
|
17.62
|
|
320
|
6.69
|
-
|
-71.0
|
183.4
|
5295
|
-4739
|
20.80
|
18.12
|
|
330
|
6.80
|
-
|
-65.5
|
175.0
|
5148
|
-4784
|
21.70
|
18.62
|
|
340
|
6.91
|
-
|
-60.4
|
167.4
|
5005
|
-4773
|
22.59
|
19.11
|
|
350
|
7.02
|
-
|
-55.7
|
160.3
|
4868
|
-4720
|
23.48
|
19.59
|
|
360
|
7.12
|
-
|
-51.2
|
153.8
|
4736
|
-4637
|
24.37
|
20.07
|
|
370
|
7.22
|
-
|
-47.1
|
147.8
|
4610
|
-4532
|
25.25
|
20.60
|
|
380
|
7.31
|
-
|
-43.2
|
142.2
|
4491
|
-4412
|
26.13
|
22.22
|
|
390
|
7.40
|
-
|
-39.6
|
137.0
|
4378
|
-4282
|
27.00
|
22.70
|
|
400
|
7.49
|
-
|
-36.2
|
132.1
|
4271
|
-4145
|
27.87
|
23.18
|
|
410
|
7.56
|
-
|
-33.0
|
127.6
|
4170
|
-4005
|
28.73
|
23.65
|
|
420
|
7.64
|
-
|
-30.0
|
123.3
|
4076
|
-3863
|
29.59
|
24.11
|
|
430
|
7.674
|
-
|
-27.1
|
119.4
|
3986
|
-3722
|
30.44
|
24.57
|
|
440
|
7.746
|
-
|
-24.4
|
115.6
|
3902
|
-3582
|
31.28
|
25.03
|
|
450
|
7.815
|
-
|
-21.9
|
112.1
|
3823
|
-3444
|
32.12
|
25.48
|
|
460
|
7.882
|
-
|
-19.4
|
108.8
|
3749
|
-3310
|
32.95
|
25.93
|
|
470
|
7.946
|
-
|
-17.1
|
105.6
|
3679
|
-3179
|
33.77
|
26.37
|
|
480
|
8.008
|
-
|
-15.0
|
102.7
|
3614
|
-3052
|
34.59
|
26.81
|
|
490
|
8.068
|
-
|
-12.9
|
99.9
|
3552
|
-2929
|
35.41
|
27.25
|
|
500
|
8.126
|
-
|
-10.9
|
97.2
|
3494
|
-2810
|
36.21
|
27.68
|
|
550
|
8.396
|
-
|
-2.2
|
85.7
|
3252
|
-2281
|
40.20
|
29.77
|
|
600
|
8.650
|
-
|
4.9
|
76.6
|
3073
|
-1849
|
44.17
|
31.79
|
|
650
|
8.917
|
-
|
10.7
|
69.2
|
2939
|
-1500
|
48.25
|
33.73
|
|
700
|
9.224
|
-
|
15.6
|
63.1
|
2839
|
-1217
|
52.61
|
35.59
|
|
750
|
9.601
|
-
|
19.8
|
57.9
|
2763
|
-986
|
57.46
|
37.40
|
|
800
|
-
|
-
|
23.4
|
53.6
|
2705
|
-798
|
-
|
-
|
|
850
|
-
|
-
|
26.5
|
49.8
|
2662
|
-642
|
-
|
-
|
|
900
|
-
|
-
|
29.3
|
46.5
|
2629
|
-513
|
-
|
-
|
|
950
|
-
|
-
|
31.7
|
43.6
|
2604
|
-406
|
-
|
-
|
|
1000
|
-
|
-
|
33.9
|
41.1
|
2586
|
-316
|
-
|
-
|
References:
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
- Hurly, J.J., Int. J. Thermophys. (23, 667, 2002).
- Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured wth a Greenspan Viscometer", Int. J. Thermophys., (2004, v25, 625).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
