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The Nanoscale Metrology Group develops length measurement science and technology for advanced manufacturing nanotechnology and nanoscience, including time-varying length (i.e., motion). Measurement capability at this scale is critically needed, for example, by the semiconductor manufacturing industry for continued scaling and device integration, and for the innovation of new nanotechnology devices. The Group disseminates the SI base unit of length down to the atomic scale, and the derived units of acceleration and acoustic pressure. Current focus areas include three-dimensional metrology of nanostructures including nanoparticles; micro- and nano-fluidic devices; and micro-electromechanical systems (MEMS). The Group develops and applies interferometry methods for measuring displacement and length, and advanced microscopy methods such as scanning electron, atomic force, helium ion, and optical.
Three-Dimensional Nanometer Metrology— We develop best-in-the-world 3D nanometer-scale dimensional measurement methods, reference artifacts and measurement protocols. To improve the accuracy and establish traceability, we develop, …
Acceleration, Vibration, and Acoustics—The Acceleration, Vibration, and Acoustics (AVA) Project advances the measurement science, develops standards, and provides calibration services for acceleration, vibration, and acoustic sensors …
Micro- and Nanoelectromechanical Systems—Microelectromechanical systems (MEMS) are integrated devices with critical applications in sensing, timing, signal processing, and biomedical diagnostics, among others. They have become ubiquitous …