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Nanoelectronics and Nanoscale Electronics Portal

Programs and Projects
CMOS Device and Reliability

The CMOS Device and Reliability Project develops advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide Semiconductor) … more

MEMS Measurement Science and Standards

Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more

Analytical Transmission Scanning Electron Microscopy

This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable … more

Dimensional Metrology for Nanofabrication

Our goal is to develop measurements that quantify the shape, size, orientation, and fidelity of nanoscale patterns as a platform to quantitatively … more

Nanostructure Fabrication and Metrology

Single photons are the fundamental particles for all optical measurements. Single photon detectors made from avalanche photodiodes or … more

Metrology and Synthesis of 3D Nanostructures

Nanostructures are a critical component of innovations in electronics, energy conservation, renewable energy, biomedical research, and health … more

Instruments
Electronic Nanodevices Laboratory

We are developing measurement and fabrication capabilities for nanoscale characterization of electronic nanodevices relevant to energy transport, … more

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General Information:
301-975-NIST (6478) Telephone
inquiries@nist.gov Email

100 Bureau Drive
Gaithersburg, MD 20899-8110

Technical Contact:
Lloyd Whitman