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Publication Citation: Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges

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Author(s): Yicheng Wang; Eric C. Benck; Martin Misakian; M. Edamura; James K. Olthoff;
Title: Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
Published: March 01, 2000
Abstract: In pulse-modulated inductively coupled plasmas generated in CF4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF4:50%Ar volume mixture with the peak rf power of 200 W at 13.56 MHz and the modulation frequency at 500 Hz with a duty cycle of 95%, the E->H mode transition occurs repetitively 0.75 ms after each rf pulse is applied. This long delay in the mode transition allows us to perform not only time-resolved measurements of optical emission and electrical characteristics but also time-resolved measurements of ion energy distributions at the grounded electrode. These measurements show that a relatively short rf off period can severely perturb the equilibrium plasma state and its recovery may take much longer than the rf off period.
Citation: Journal of Applied Physics
Volume: 87
Issue: 5
Pages: pp. 2114 - 2121
Keywords: ;discharges;inductively coupled plasmas;plasmas;pulsed plasmas;
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (5MB)