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|Author(s):||Yicheng Wang; Eric C. Benck; Martin Misakian; M. Edamura; James K. Olthoff;|
|Title:||Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges|
|Published:||March 01, 2000|
|Abstract:||In pulse-modulated inductively coupled plasmas generated in CF4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF4:50%Ar volume mixture with the peak rf power of 200 W at 13.56 MHz and the modulation frequency at 500 Hz with a duty cycle of 95%, the E->H mode transition occurs repetitively 0.75 ms after each rf pulse is applied. This long delay in the mode transition allows us to perform not only time-resolved measurements of optical emission and electrical characteristics but also time-resolved measurements of ion energy distributions at the grounded electrode. These measurements show that a relatively short rf off period can severely perturb the equilibrium plasma state and its recovery may take much longer than the rf off period.|
|Citation:||Journal of Applied Physics|
|Pages:||pp. 2114 - 2121|
|Keywords:||discharges,inductively coupled plasmas,plasmas,pulsed plasmas|
|Research Areas:||Electronics & Telecommunications|
|PDF version:||Click here to retrieve PDF version of paper (5MB)|