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Robert R. Keller, Katherine P. Rice, Mark Stoykovich
Abstract
Transmission electron backscatter diffraction (t-EBSD), also known as transmission electron forward scatter diffraction (t-EFSD) or transmission Kikuchi diffraction in the SEM (TKD-SEM), can provide significant improvements in spatial resolution over conventional EBSD performed in reflection in many cases. Over the last few years, truly remarkable results have been demonstrated, including phase identification of nanoparticles as small as 5 nm,effective orientation mapping resolutions of 2 nm to 3 nm for thin metal films, and high-contrast patterns from films as thin as 5 nm in plan-view.
Keller, R.
, Rice, K.
and Stoykovich, M.
(2015),
Beam broadening in transmission EBSD, Microscopy Today, [online], https://doi.org/10.1017/S1551929515000048
(Accessed April 27, 2024)