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Publication Citation: Recent Advances in Focused Ion Beam Technology and Applications

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Author(s): Nabil Bassim; Keana C. Scott; Lucille A. Giannuzzi;
Title: Recent Advances in Focused Ion Beam Technology and Applications
Published: April 11, 2014
Abstract: Focused ion beam (FIB) microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope (SEM), offer the opportunity for novel sample imaging, sectioning, specimen preparation, 3-dimensional nano- to macro-scale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation such as new ion sources which encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical and ion contrast characterization, and robust and versatile process automation capabilities are exciting advances for many fields of materials research.
Citation: Mrs Bulletin
Volume: 39
Pages: pp. 317 - 325
Keywords: focused ion beam;scanning electron microscopy;FIB-SEM;lithography;ion sources;ion-solid interaction;specimen preparation; 3D tomography;3D microanalysis
Research Areas: Instrumentation, Materials Science, Measurements
DOI: http://dx.doi.org/10.1557/mrs.2014.52  (Note: May link to a non-U.S. Government webpage)