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Publication Citation: Fast-Capacitance for Advanced Device Characterization

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Author(s): Pragya R. Shrestha; Kin P. Cheung; Jason T. Ryan; Jason P. Campbell; Helmut Baumgart;
Title: Fast-Capacitance for Advanced Device Characterization
Published: March 03, 2014
Abstract: Fast-CV measurements are frequently being used to study transient phenomena associated with advanced devices. In this study, we show that many artifacts plague this measurement and then provide a proper method to legitimize fast-CV measurements as trustworthy. We show a remarkably accurate correspondence between a complete fast CV measurement, from accumulation to inversion, and a conventional CV measurement on the same device. The results distinguish fast-CV as a powerful tool for device characterization and reliability measurements.
Conference: 2012 IEEE International Integrated Reliability Workshop
Proceedings: 2012 IEEE International Integrated Reliability Workshop Final Report
Pages: pp. 26 - 29
Location: Fallen Leaf Lake, CA
Dates: October 13-17, 2013
Research Areas: Characterization
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)