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|Author(s):||Pragya R. Shrestha; Kin P. Cheung; Jason T. Ryan; Jason P. Campbell; Helmut Baumgart;|
|Title:||Fast-Capacitance for Advanced Device Characterization|
|Published:||March 03, 2014|
|Abstract:||Fast-CV measurements are frequently being used to study transient phenomena associated with advanced devices. In this study, we show that many artifacts plague this measurement and then provide a proper method to legitimize fast-CV measurements as trustworthy. We show a remarkably accurate correspondence between a complete fast CV measurement, from accumulation to inversion, and a conventional CV measurement on the same device. The results distinguish fast-CV as a powerful tool for device characterization and reliability measurements.|
|Conference:||2012 IEEE International Integrated Reliability Workshop|
|Proceedings:||2012 IEEE International Integrated Reliability Workshop Final Report|
|Pages:||pp. 26 - 29|
|Location:||Fallen Leaf Lake, CA|
|Dates:||October 13-17, 2013|
|PDF version:||Click here to retrieve PDF version of paper (1MB)|