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Publication Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2013

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Author(s): Erik M. Secula; David G. Seiler;
Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Published: March 26, 2013
Abstract:
Conference: 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Pages: 350 pp.
Location: Gaithersburg, MD
Dates: March 26-28, 2013
Research Areas: Nanotechnology, Characterization, Nanometrology, and Nanoscale Measurements