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NIST Authors in Bold
|Author(s):||Rebecca R. Kirkpatrick; William A. Osborn; Michael S. Gaither; Richard S. Gates; Frank W. DelRio; Robert F. Cook;|
|Title:||On the bending strength of single-crystal silicon theta-like specimens|
|Published:||July 10, 2013|
|Abstract:||A new theta geometry was developed for micro-scale bending strength measurements. The new ,gapŠ theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on single-crystal silicon specimens microfabricated using two different etch processes. The resulting gap theta strengths were described by three-parameter Weibull distributions derived from parameters determined from the arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.|
|Citation:||Journal of the Materials Research Society|
|Keywords:||Finite element methods, fracture strength, microelectromechanical systems, single-crystal silicon, Weibull statistics|