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Publication Citation: On the bending strength of single-crystal silicon theta-like specimens

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Author(s): Rebecca R. Kirkpatrick; William A. Osborn; Michael S. Gaither; Richard S. Gates; Frank W. DelRio; Robert F. Cook;
Title: On the bending strength of single-crystal silicon theta-like specimens
Published: July 10, 2013
Abstract: A new theta geometry was developed for micro-scale bending strength measurements. The new ,gapŠ theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on single-crystal silicon specimens microfabricated using two different etch processes. The resulting gap theta strengths were described by three-parameter Weibull distributions derived from parameters determined from the arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.
Citation: Journal of the Materials Research Society
Keywords: Finite element methods; fracture strength; microelectromechanical systems; single-crystal silicon; Weibull statistics
Research Areas: Reliability