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Publication Citation: Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

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Author(s): Yong Sik Kim; Nicholas G. Dagalakis; Satyandra K. Gupta;
Title: Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features
Published: March 26, 2013
Abstract: Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage is presented based on bulk micromachining technologies. This stage is electro thermally actuated for out-of-plane motion by incorporating beams with step features. The fabricated motion stage has demonstrated displacements of 85 um with 0.4 um/mA rates and generated up to 11.8 mN forces with stiffness of 138.8 N/m. These properties obtained from the presented stage are in a similar level to in-plane motion stages which improve its usefulness when used in collaboration with in-plane motion stages.
Citation: Journal of Micromechanic and Microengineering
Volume: 23
Pages: 10 pp.
Keywords: MEMS; precision motion stage; out-of-plane; Silicon-on-insulator; bulk micromachining
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing, Nanomanufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)