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Publication Citation: Modeling Scanning Electron Microscope Measurements with Charging

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Author(s): John S. Villarrubia;
Title: Modeling Scanning Electron Microscope Measurements with Charging
Published: April 03, 2013
Abstract:
Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics
Location: Gaithersburg, MD
Dates: March 25-28, 2013
Keywords: Charging, contact hole, scanning electron microscopy (SEM), dimensional metrology, mathematical modeling, Monte Carlo simulation
Research Areas: Electron microscopy (EM, TEM, SEM, STEM), Dimensional Metrology, Nanoelectronics and Nanoscale Electronics, Modeling
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