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Publication Citation: Modeling Scanning Electron Microscope Measurements with Charging

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Author(s): John S. Villarrubia;
Title: Modeling Scanning Electron Microscope Measurements with Charging
Published: April 03, 2013
Abstract:
Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics
Location: Gaithersburg, MD
Dates: March 25-28, 2013
Keywords: Charging; contact hole; scanning electron microscopy (SEM); dimensional metrology; mathematical modeling; Monte Carlo simulation
Research Areas: Dimensional Metrology, Electron microscopy (EM, TEM, SEM, STEM), Modeling, Nanoelectronics and Nanoscale Electronics
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