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|Author(s):||Mohammad Olfatnia; Siddharth Sood; Jason J. Gorman; Shorya Awtar;|
|Title:||Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism|
|Published:||June 20, 2012|
|Abstract:||This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation voltage (V), this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP flexure mechanism design offers high bearing direction stiffness (Kx) while maintaining low motion direction stiffness (Ky), over a large range of motion direction displacement. The resulting high (Kx /Ky) ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.|
|Proceedings:||Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop|
|Pages:||pp. 409 - 412|
|Location:||Hilton Head, SC|
|Dates:||June 3-7, 2012|
|Keywords:||Microelectromechanical systems, MEMS, electrostatic actuator, flexure mechanism, large stroke actuator|
|Research Areas:||Nanomechanics, Microelectromechanical systems (MEMS), Nanotechnology|
|PDF version:||Click here to retrieve PDF version of paper (930KB)|