Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.

Published

Author(s)

Vincent K. Luciani, William D. Young Jr, Lei Chen, Jerry L. Bowser
Proceedings Title
University Government Industry Micro/Nano Symposium
Conference Dates
July 9-10, 2012
Conference Location
Berkeley, CA, US

Citation

Luciani, V. , Young Jr, W. , Chen, L. and Bowser, J. (2012), A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon., University Government Industry Micro/Nano Symposium, Berkeley, CA, US, [online], https://doi.org/10.1109/UGIM.2012.6247086, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911015 (Accessed March 19, 2024)
Created July 22, 2012, Updated October 12, 2021