| Author(s): |
Vincent K. Luciani; William D. Young Jr; Lei Chen; Jerry L. Bowser; |
| Title: |
A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon. |
| Published: |
July 23, 2012 |
| Abstract: |
|
| Proceedings: |
University Government Industry Micro/Nano Symposium |
| Pages: |
1 pp. |
| Location: |
Berkeley, CA |
| Dates: |
July 9-10, 2012 |
| Research Areas: |
Nanotechnology, Deposition |
| DOI: |
10.1109/UGIM.2012.6247086 (Note: May link to a non-U.S. Government webpage) |
| PDF version: |
 Click here to retrieve PDF version of paper (65KB) |
