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Publication Citation: Chemical Imaging Beyond the Diffraction Limit: Experimental Validation of the PTIR Technique

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Author(s): Basudev Lahiri; Glenn E. Holland; Andrea Centrone;
Title: Chemical Imaging Beyond the Diffraction Limit: Experimental Validation of the PTIR Technique
Published: February 11, 2013
Abstract: Photo Thermal Induced Resonance (PTIR), recently attracted great interest for enabling chemical identification and imaging with nanoscale resolution. In this work, electron beam nano-patterned polymer samples were fabricated directly on 3-dimentional zinc selenide prisms and used to experimentally evaluate the PTIR lateral resolution, sensitivity and linearity. Experiments prove that PTIR can be used for quantitative chemical analysis at the nanoscale for samples up to ~1 µm thick (linearity limit). The analysis of thicker samples provides the first evidence that the previously developed PTIR theory is correct.
Citation: Small
Volume: 9
Issue: 3
Pages: pp. 439 - 445
Keywords: Infrared Spectroscopy; Chemical Imaging; Nanoscale Characterization; AFM; Electron Beam Lithography.
Research Areas: Chemical Analysis, Vibrational, Atomic force microscopy (AFM)
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)