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Publication Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2011

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Author(s): David G. Seiler; Alain C. Diebold; Robert McDonald; Amal Chabli; Erik M. Secula;
Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2011
Published: December 28, 2011
Abstract:
Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2011
Publisher: American Institute of Physics, Melville, NY
Volume: 1395
Pages: pp. 1 - 377
Research Areas: Semiconductors, Nanoelectronics and Nanoscale Electronics