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Publication Citation: Displacement Sensor for Detecting Sub-micrometer Motion

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Author(s): Svetlana Avramov-Zamurovic1; Jae M. Yoo; Nicholas G. Dagalakis; Rae Duk Lee;
Title: Displacement Sensor for Detecting Sub-micrometer Motion
Published: July 06, 2012
Abstract: This paper describes the design of a nano displacement sensor that detects the presence of a moving platform by using fringing electric field. Its electrodes are commercially prefabricated Teflon insulated wires. This solution provides for excellent insulation between the sensor electrodes and allows us to use high voltage to drive a Capacitance Bridge, thus achieving better resolution in measuring the sensor capacitance. The size of the wires explored in the paper follows standard American wire gauge AWG. The smallest diameter of a bare conductor is of the order of 25 μm permitting us to solder the coaxial cable connectors from the Capacitance Bridge to the sensor electrodes. This approach achieves good connectivity and reduces the noise level.
Conference: Precision Electromagnetic Measurements (CPEM 2012)
Proceedings: Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012)
Pages: pp. 458 - 459
Location: Washington, DC
Dates: July 1-6, 2012
Keywords: Nanopositioning, Fringing Electric Field, Capacitance Sensor
Research Areas: Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (461KB)