| Author(s): |
Svetlana Avramov-Zamurovic1; Jae Myung Yoo; Nicholas G. Dagalakis; Rae Duk Lee; |
| Title: |
Displacement Sensor for Detecting Sub-micrometer Motion |
| Published: |
July 06, 2012 |
| Abstract: |
This paper describes the design of a nano displacement sensor that detects the presence of a moving platform by using fringing electric field. Its electrodes are commercially prefabricated Teflon insulated wires. This solution provides for excellent insulation between the sensor electrodes and allows us to use high voltage to drive a Capacitance Bridge, thus achieving better resolution in measuring the sensor capacitance. The size of the wires explored in the paper follows standard American wire gauge AWG. The smallest diameter of a bare conductor is of the order of 25 μm permitting us to solder the coaxial cable connectors from the Capacitance Bridge to the sensor electrodes. This approach achieves good connectivity and reduces the noise level. |
| Conference: |
Precision Electromagnetic Measurements (CPEM 2012) |
| Proceedings: |
Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012) |
| Pages: |
pp. 458 - 459 |
| Location: |
Washington, DC |
| Dates: |
July 1-6, 2012 |
| Keywords: |
Nanopositioning, Fringing Electric Field, Capacitance Sensor |
| Research Areas: |
Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (451KB) |
