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Publication Citation: The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

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Author(s): Janet M. Cassard; Jon C. Geist; Michael Gaitan; David G. Seiler;
Title: The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published: March 21, 2012
Abstract: The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary standard test methods. Example NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Proceedings: International Conference on Microelectronic Test Structures (ICMTS)
Location: San Diego, CA
Dates: March 19-22, 2012
Keywords: ASTM; cantilevers; fixed-fixed beams; interferometry; length measurements; MEMS; residual strain; residual stress; SEMI; RM; step height measurements; strain gradient; stress gradient; test structures; thickness; vibrometry; Young's modulus measurements
Research Areas: Standard Reference Materials
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)