| Author(s): |
Young M. Choi; Nicholas G. Dagalakis; Jason J. Gorman; Seung Ho Yang; Yong Sik Kim; Jae Myung Yoo; |
| Title: |
A high-bandwidth electromagnetic MEMS motion stage for scanning applications |
| Published: |
August 23, 2012 |
| Abstract: |
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as linear characteristics. A planar microcoil and a permanent magnet generate Lorentz force, which drives the flexure-supported platform directly. The copper microcoil is electroplated on a silicon substrate and the platform is fabricated through silicon bulk micromachining of silicon-on-insulator wafers. The resonance frequency of the fabricated micro stage is 2.0 kHz which can give an open-loop control bandwidth larger than 500 Hz. Experimental results verify highly linear bidirectional motion without any hysteresis or nonlinearity. Also, excellent high-frequency open-loop tracking control performance is demonstrated. |
| Citation: |
Journal of Micromechanics and Microengineering |
| Volume: |
22 |
| Issue: |
10 |
| Pages: |
9 pp. |
| Keywords: |
MEMS; scanning; electromagnetic actuator |
| Research Areas: |
Microelectronics |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
