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Publication Citation: Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip

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Author(s): Balasubramanian Muralikrishnan; Jack A. Stone Jr; Craig M. Shakarji; John R. Stoup;
Title: Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip
Published: January 05, 2012
Abstract: The tip of a traditional CMM probe used for measurements of macro-scale artifacts is generally a sphere of excellent geometry. Its known diameter (from a prior calibration) and form along with the known approach direction (which is normal to the surface) facilitates probe radius compensation in a straightforward manner. Neither of these conditions is valid for micro-scale measurements made with a flexible fiber probe on a CMM. This presents two challenges. The first involves the calibration of the probe‰s true size and shape. The second involves developing a method for compensating probe radius and form on measurement data from test artifacts. We describe these issues here in the context of an application involving three-dimensional measurements on micro-scale features (a conical section of 20 half angle and a rounded tip of 38 m radius) performed with the NIST fiber probe.
Citation: Measurement Science & Technology
Keywords: Coordinate metrology; Ellipsoid fit; Fiber probe;
Research Areas: Dimensional Metrology
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