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|Author(s):||Balasubramanian Muralikrishnan; Jack A. Stone Jr.; Craig M. Shakarji; John R. Stoup;|
|Title:||Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip|
|Published:||January 05, 2012|
|Abstract:||The tip of a traditional CMM probe used for measurements of macro-scale artifacts is generally a sphere of excellent geometry. Its known diameter (from a prior calibration) and form along with the known approach direction (which is normal to the surface) facilitates probe radius compensation in a straightforward manner. Neither of these conditions is valid for micro-scale measurements made with a flexible fiber probe on a CMM. This presents two challenges. The first involves the calibration of the probe‰s true size and shape. The second involves developing a method for compensating probe radius and form on measurement data from test artifacts. We describe these issues here in the context of an application involving three-dimensional measurements on micro-scale features (a conical section of 20 half angle and a rounded tip of 38 m radius) performed with the NIST fiber probe.|
|Citation:||Measurement Science & Technology|
|Keywords:||Coordinate metrology, Ellipsoid fit, Fiber probe,|
|Research Areas:||Dimensional Metrology|
|PDF version:||Click here to retrieve PDF version of paper (244KB)|