| Author(s): |
Balasubramanian Muralikrishnan; Jack A. Stone Jr; Craig M. Shakarji; John R. Stoup; |
| Title: |
Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip |
| Published: |
January 05, 2012 |
| Abstract: |
The tip of a traditional CMM probe used for measurements of macro-scale artifacts is generally a sphere of excellent geometry. Its known diameter (from a prior calibration) and form along with the known approach direction (which is normal to the surface) facilitates probe radius compensation in a straightforward manner. Neither of these conditions is valid for micro-scale measurements made with a flexible fiber probe on a CMM. This presents two challenges. The first involves the calibration of the probe’s true size and shape. The second involves developing a method for compensating probe radius and form on measurement data from test artifacts. We describe these issues here in the context of an application involving three-dimensional measurements on micro-scale features (a conical section of 20 half angle and a rounded tip of 38 m radius) performed with the NIST fiber probe. |
| Citation: |
Measurement Science & Technology |
| Keywords: |
Coordinate metrology; Ellipsoid fit; Fiber probe; |
| Research Areas: |
Dimensional Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (239KB) |
