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|Author(s):||Ronnie R. Fesperman Jr.; M A. Donmez; Shawn P. Moylan;|
|Title:||Ultra-Precision Linear Motion Metrology of a Commerically Available Linear Translation Stage|
|Published:||November 18, 2011|
|Abstract:||Many new compact ultra-precision linear translation stages with exceptionally long ranges of motion on the order of tens of millimeters and positioning resolutions on the order of a nanometer are finding their way into emerging nanotechnologies. This class of positioning system typically has specified linear error motions on the order of a few hundred nanometers or better and angular error motions on the order of 10 arcsec or better. However, measuring and certifying the positioning performance of these new stages with off-the-self instrumentation prescribed by international standards can be very challenging if the test uncertainty ratio is to be greater or equal to 4:1. This paper gives an overview of our effort to extend our measurement capabilities to measure the six error motions of a commercial nanopositioner that has a max travel of 110 mm and a positioning resolution of 1 nm. Test uncertainty ratios of 15:1 to 1.5:1 are achieved.|
|Proceedings:||Proceedings of the 26th Annual Meeting of the American Society for Precision Engineering (ASPE)|
|Dates:||November 13-18, 2011|
|Keywords:||metrology, linear positioning, straightness, angular deviation, measurement uncertainty|
|Research Areas:||Metrology and Standards for Manufacturing Equipment, Metrology, Manufacturing|
|PDF version:||Click here to retrieve PDF version of paper (179KB)|