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Publication Citation: MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms

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Author(s): Brenton J. Knuffman; Adam V. Steele; Jon Orloff; Mostafa Maazouz; Jabez J. McClelland;
Title: MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms
Published: November 10, 2011
Abstract: MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms
Conference: Frontiers of Characterization and Metrology for Nanoelectronics
Volume: 1395
Issue: 1
Pages: pp. 85 - 89
Location: Grenoble, -1
Dates: May 23-26, 2011
Keywords: Focused ion beam; ion microscopy; laser cooling.
Research Areas: Focused ion beam imaging (FIB)
PDF version: PDF Document Click here to retrieve PDF version of paper (689KB)