| Author(s): |
Brenton J. Knuffman; Adam V. Steele; Jon Orloff; Mostafa Maazouz; Jabez J. McClelland; |
| Title: |
MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms |
| Published: |
November 10, 2011 |
| Abstract: |
MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms |
| Conference: |
Frontiers of Characterization and Metrology for Nanoelectronics |
| Volume: |
1395 |
| Issue: |
1 |
| Pages: |
pp. 85 - 89 |
| Location: |
Grenoble, -1 |
| Dates: |
May 23-26, 2011 |
| Keywords: |
Focused ion beam; ion microscopy; laser cooling. |
| Research Areas: |
Focused ion beam imaging (FIB) |
| PDF version: |
 Click here to retrieve PDF version of paper (673KB) |
