Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publication Citation: Status of the MEMS Standardization Project at NIST: November 2010

NIST Authors in Bold

Author(s): Janet M. Cassard;
Title: Status of the MEMS Standardization Project at NIST: November 2010
Published: November 08, 2010
Abstract:
Research Areas: Standard Reference Materials