NIST Time
NIST Home
About NIST
Contact Us
A-Z Site Index
Publications
Subject Areas
Bioscience & Health
Building and Fire Research
Chemistry
Electronics & Telecommunications
Energy
Environment/Climate
Information Technology
Manufacturing
Materials Science
Math
Nanotechnology
Physics
Public Safety & Security
Quality
Transportation
Products/Services
Calibrations
Computer Security Resource Center
Databases
Laboratory Accreditation
Measurement Services
NIST Research Library
Standard Reference Materials
Standards
Traceability
Weights and Measures
NIST Organization
What We Do
Organization Chart
Budget Information
Office of the Director
Laboratories & Major Programs
Locations
Staff Directory
Working With Us
Seminars and Meetings
News
Programs & Projects
Bioscience & Health
Building and Fire Research
Chemistry
Electronics & Telecommunications
Energy
Environment/Climate
Information Technology
Manufacturing
Materials Science
Math
Nanotechnology
Neutron Research
Physics
Public Safety & Security
Quality
Transportation
User Facilities
Cntr. for Nanoscale Science & Tech.
NIST Center for Neutron Research
Work with NIST
Employment Information
Funding Opportunities
NIST Patents/Licensing
Reimbursable Agreements
Tech. Transfer/Research Partnerships
Vendor Opportunities/Information
Working With NIST Factsheet
NIST Home
>
NIST Manuscript Publication Search
Publication Citation
NIST Authors in
Bold
Author(s):
Janet M. Cassard;
Title:
Status of the MEMS Standardization Project at NIST: November 2010
Published:
November 08, 2010
Abstract:
Research Areas:
Standard Reference Materials
