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Publication Citation: Optical illumination optimization for patterned defect inspection

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Author(s): Bryan M. Barnes; Richard Quintanilha; Martin Y. Sohn; Hui Zhou; Richard M. Silver;
Title: Optical illumination optimization for patterned defect inspection
Published: April 20, 2011
Abstract: Rapidly decreasing critical dimensions (CD) for semiconductor devices drive the study of improved methods for the detection of defects within patterned areas. As reduced CDs are being achieved through directional patterning, additional constraints and opportunities present themselves in defect metrology. This simulation and experimental study assesses potential improvements in patterned defect inspection that may be achieved by engineering the light incident to the sample within a high-magnification imaging platform. Simulation variables include the incident angle, polarization, and wavelength for defect types common to directional device layouts. Detectability is determined through differential images between no-defect- and defect-containing images. Alternative metrologies such as interference microscopy are also investigated through modeling. The measurement of a sub-20 nm defects is demonstrated experimentally using 193 nm light. The complex interplay of unidirectional patterning and highly directional defects is explored using structured off-axis illumination and polarization.
Conference: Metrology, Inspection, and Process Control for Microlithography XXV
Proceedings: SPIE Advanced Lithography
Volume: 7971
Location: Gaithersburg, MD
Dates: February 27-March 3, 2011
Keywords: Defect detection, Scatterfield optical microscopy, illumination optimization, bright-field microscopy, dark-field microscopy
Research Areas: Semiconductors, Characterization, Optical microscopy, Process Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)