| Author(s): |
Houxun H. Miao; Kartik A. Srinivasan; Matthew T. Rakher; Marcelo I. Davanco; Vladimir A. Aksyuk; |
| Title: |
CAVITY OPTOMECHANICAL SENSORS |
| Published: |
June 05, 2011 |
| Abstract: |
We report a novel type of fully integrated optomechanical sensor and demonstrate high sensitivity mechanical displacement measurements on chip. We sense the motion of micro and nano-mechanical devices by near field coupling them to high quality factor optical microdisk resonators. In a first geometry, we sense the position of a dielectric ring moved by a micromechanical actuator. Tunable optomechanical coupling of up to g_OM/2π = 4.8 GHz/nm results in the photodetector-limited displacement sensitivity of 4.3x10^-15 m/√Hz with optical excitation power below 20 uW. In a second geometry, we sense the thermal motion of a nanoscale cantilever probe. Transduction of the cantilever’s MHz frequency vibration is achieved with a displacement sensitivity of 4.4x10-16 m/√Hz and a mechanical quality factor of 6000 is measured in vacuum. |
| Proceedings: |
Transducers 2011 |
| Pages: |
pp. 1535 - 1538 |
| Location: |
Beijing, -1 |
| Dates: |
June 5-9, 2011 |
| Keywords: |
cavity optomechanics; MEMS, NEMS, interferometric sensing, optical position measurement |
| Research Areas: |
Nanophotonics, Nanomechanics, Nanoelectromechanical systems (NEMS), Atomic force microscopy (AFM), Characterization, Nanometrology, and Nanoscale Measurements, Microelectromechanical systems (MEMS) |
| PDF version: |
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