| Author(s): |
Craig D. McGray; Richard A. Allen; Marc J. Cangemi; Jon C. Geist; |
| Title: |
Rectangular Scale-Similar Etch Pits in Monocrystalline Diamond |
| Published: |
September 15, 2011 |
| Abstract: |
Etching of monocrystalline diamond in oxygen and water vapor at 1100° C through small pores in a silicon nitride film produced smooth-walled rectangular cavities. The cavities were imaged by electron microscope and measured by interferometric microscopy. The observed cavities ranged in size from approximately 1 µm up to 72 µm wide, in each case exhibiting smooth, vertical sidewalls, a flat bottom, and a depth equal to half its width. Cavity boundaries were determined to lie along slow-etching (100) crystallographic planes, suggesting the possibility of a powerful class of techniques for high-aspect-ratio bulk micromachining of diamond. |
| Citation: |
Diamond and Related Materials |
| Volume: |
20 |
| Issue: |
10 |
| Pages: |
pp. 1363 - 1365 |
| Keywords: |
diamond; anisotropic etching; crystallographic etching; oxidation; micromachining; MEMS; nanofabrication |
| Research Areas: |
Nanofabrication, Nanomanufacturing, and Nanoprocessing, Nanotechnology |
| PDF version: |
 Click here to retrieve PDF version of paper (135KB) |
