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Publication Citation: Rectangular Scale-Similar Etch Pits in Monocrystalline Diamond

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Author(s): Craig D. McGray; Richard A. Allen; Marc J. Cangemi; Jon C. Geist;
Title: Rectangular Scale-Similar Etch Pits in Monocrystalline Diamond
Published: September 15, 2011
Abstract: Etching of monocrystalline diamond in oxygen and water vapor at 1100° C through small pores in a silicon nitride film produced smooth-walled rectangular cavities. The cavities were imaged by electron microscope and measured by interferometric microscopy. The observed cavities ranged in size from approximately 1 µm up to 72 µm wide, in each case exhibiting smooth, vertical sidewalls, a flat bottom, and a depth equal to half its width. Cavity boundaries were determined to lie along slow-etching (100) crystallographic planes, suggesting the possibility of a powerful class of techniques for high-aspect-ratio bulk micromachining of diamond.
Citation: Diamond and Related Materials
Volume: 20
Issue: 10
Pages: pp. 1363 - 1365
Keywords: diamond, anisotropic etching, crystallographic etching, oxidation, micromachining, MEMS, nanofabrication
Research Areas: Nanotechnology, Nanofabrication, Nanomanufacturing, and Nanoprocessing
PDF version: PDF Document Click here to retrieve PDF version of paper (138KB)