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Publication Citation: Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)

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Author(s): Kai Li; Pradeep N. Namboodiri; Sumanth B. Chikkamaranahalli; Gheorghe Stan; Ravikiran Attota; Joseph Fu; Richard M. Silver;
Title: Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)
Published: August 09, 2011
Abstract: Micro scale features are fabricated on Si (100) surfaces using lithographic techniques and then thermally processed in an ultra high vacuum (UHV) environment. Samples are flash heated at 1200 °C and further annealed at 1050 °C for 18 hours. The surface morphology was examined using an atomic force microscopy (AFM). The process resulted in the formation of symmetric, reproducible step-terrace patterns with very wide atomically flat regions exhibiting highly reproducible step-terrace morphology. 25 µm lithographically patterned cells spontaneously transform into a symmetric formation marked by step bunches pinned by pyramidal structures separated by wide atomic terraces. The pyramidal features are visible using a conventional optical microscope and are to be used as fiducial marks to locate nanoscale features fabricated on the atomically flat terraces.
Citation: Applied Physics Letters
Volume: 29
Issue: 4
Pages: pp. 041806-1 - 041806-4
Keywords: Silicon (100),Atomic Force Microscopy,Atmic scale Step Morphology
Research Areas: Scanning tunneling microscopy (STM), Surface Physics, Atomic force microscopy (AFM)
PDF version: PDF Document Click here to retrieve PDF version of paper (599KB)