| Author(s): |
Victor H. Vartanian; Paul McClure; Vladimir Mancevski; Joseph J. Kopanski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin; Vincent LaBella; Kathleen Dunn; |
| Title: |
Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology |
| Published: |
August 03, 2010 |
| Abstract: |
This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples. |
| Pages: |
30 pp. |
| Research Areas: |
Characterization, Nanometrology, and Nanoscale Measurements |
