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NIST Authors in Bold
|Author(s):||Victor H. Vartanian; Paul McClure; Vladimir Mancevski; Joseph J. Kopanski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin; Vincent LaBella; Kathleen Dunn;|
|Title:||Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology|
|Published:||August 03, 2010|
|Abstract:||This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.|
|Research Areas:||Characterization, Nanometrology, and Nanoscale Measurements|