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Publication Citation: Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology

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Author(s): Victor H. Vartanian; Paul McClure; Vladimir Mancevski; Joseph J. Kopanski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin; Vincent LaBella; Kathleen Dunn;
Title: Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology
Published: August 03, 2010
Abstract: This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.
Pages: 30 pp.
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements