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Publication Citation: Atomic Force Microscope Cantilever Flexural Stiffness Calibration: Toward a Standard Traceable Method

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Author(s): Richard S. Gates; Mark Reitsma; John A. Kramar; Jon R. Pratt;
Title: Atomic Force Microscope Cantilever Flexural Stiffness Calibration: Toward a Standard Traceable Method
Published: July 01, 2011
Abstract: The evolution of the atomic force microscope into a useful tool for measuring mechanical properties of surfaces at the nanoscale has spurred the need for more precise and accurate methods for calibrating the spring constants of test cantilevers. Groups within international standards organizations such as the International Organization for Standardization and the Versailles project on Advanced Materials and Standards (VAMAS) are conducting studies to determine which methods are best suited for these calibrations and to try to improve the reproducibility and accuracy of these measurements among different laboratories. This paper expands on a recent mini round robin within VAMAS Technical Working Area 29 to measure the spring constant of a single batch of triangular silicon nitride cantilevers sent to three international collaborators. Calibration techniques included reference cantilever, added mass, and two forms of thermal methods. Results are compared to measurements traceable to the International System of Units provided by an electrostatic force balance. A series of guidelines are also discussed for procedures that can improve the running of round robins in atomic force microscopy.
Citation: Journal of Research (NIST JRES) -
Volume: 116
Issue: 4
Pages: pp. 703 - 727
Keywords: AFM; calibration; cantilever; spring constant; stiffness
Research Areas: Calibrations (Mechanical), Standards
DOI: http://dx.doi.org/10.6028/jres.116.015
PDF version: PDF Document Click here to retrieve PDF version of paper (637KB)