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|Author(s):||Theodore V. Vorburger; Richard M. Silver; Rainer Brodmann; Boris Brodmann; Jorg Seewig;|
|Title:||Light Scattering Methods|
|Published:||April 09, 2011|
|Abstract:||Light scattering belongs to a class of techniques known as area-integrating methods for measuring surface texture. Rather than being based on coordinate measurement, these methods probe an area of the surface altogether and yield parameters that are characteristic of the texture of the area as a whole. The specular beam intensity, the angle resolved scatter, and the angle integrated scatter are examples of measurands from light scattering that can yield useful parameters of the surface texture. Uses of light scatter for inspecting the surfaces of mechanical and optical components as well as surfaces produced in semiconductor manufacturing are primarily reviewed here. Several documentary standards describing best practices are also briefly reviewed.|
|Citation:||Optical Methods for Areal Surface Texture Measurement|
|Publisher:||Springer, New York, NY|
|Pages:||pp. 287 - 318|
|Keywords:||surface, texture, roughness, metrology, light, optical, scatter, TIS, angle resolved, BRDF, area-integrating,specular|
|Research Areas:||Metrology and Standards for Manufacturing Processes|
|PDF version:||Click here to retrieve PDF version of paper (895KB)|