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Publication Citation: Light Scattering Methods

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Author(s): Theodore V. Vorburger; Richard M. Silver; Rainer Brodmann; Boris Brodmann; Jorg Seewig;
Title: Light Scattering Methods
Published: April 09, 2011
Abstract: Light scattering belongs to a class of techniques known as area-integrating methods for measuring surface texture. Rather than being based on coordinate measurement, these methods probe an area of the surface altogether and yield parameters that are characteristic of the texture of the area as a whole. The specular beam intensity, the angle resolved scatter, and the angle integrated scatter are examples of measurands from light scattering that can yield useful parameters of the surface texture. Uses of light scatter for inspecting the surfaces of mechanical and optical components as well as surfaces produced in semiconductor manufacturing are primarily reviewed here. Several documentary standards describing best practices are also briefly reviewed.
Citation: Optical Methods for Areal Surface Texture Measurement
Publisher: Springer, New York, NY
Pages: pp. 287 - 318
Keywords: surface; texture; roughness; metrology; light; optical; scatter; TIS; angle resolved; BRDF; area-integrating;specular
Research Areas: Metrology and Standards for Manufacturing Processes
PDF version: PDF Document Click here to retrieve PDF version of paper (895KB)