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Publication Citation: Conductive Carbon Nanotubes for Semiconductor Metrology

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Author(s): Joseph J. Kopanski; Victor H. Vartanian; Vladimir Mancevski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin;
Title: Conductive Carbon Nanotubes for Semiconductor Metrology
Published: August 10, 2010
Abstract: This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.
Conference: SPIE NanoScience + Engineering
Proceedings: Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767
Volume: 7767
Pages: 15 pp.
Location: San Diego, CA
Dates: August 1-6, 2010
Keywords: Carbon Nanotube, Dopant profiling, Scanning Capacitance Microscope
Research Areas: Electronics & Telecommunications, Process Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)