| Author(s): |
Joseph J. Kopanski; Victor H. Vartanian; Vladimir Mancevski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin; |
| Title: |
Conductive Carbon Nanotubes for Semiconductor Metrology |
| Published: |
August 10, 2010 |
| Abstract: |
This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples. |
| Conference: |
SPIE NanoScience + Engineering |
| Proceedings: |
Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767 |
| Volume: |
7767 |
| Pages: |
15 pp. |
| Location: |
San Diego, CA |
| Dates: |
August 1-6, 2010 |
| Keywords: |
Carbon Nanotube, Dopant profiling, Scanning Capacitance Microscope |
| Research Areas: |
Electronics & Telecommunications, Process Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
