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NIST Authors in Bold
|Author(s):||Joseph J. Kopanski; Victor H. Vartanian; Vladimir Mancevski; Phillip D. Rack; Ilona Sitnitsky; Matthew D. Bresin;|
|Title:||Conductive Carbon Nanotubes for Semiconductor Metrology|
|Published:||August 10, 2010|
|Abstract:||This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.|
|Conference:||SPIE NanoScience + Engineering|
|Proceedings:||Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767|
|Location:||San Diego, CA|
|Dates:||August 1-6, 2010|
|Keywords:||Carbon Nanotube, Dopant profiling, Scanning Capacitance Microscope|
|Research Areas:||Electronics & Telecommunications, Process Metrology|
|PDF version:||Click here to retrieve PDF version of paper (1MB)|