Afridi, M.
and Geist, J.
(2010),
MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589
(Accessed April 16, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
MEMS Microhotplate Temperature Sensor BIST: Importance and Applications
Published
Author(s)
,
Abstract
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.Proceedings Title
IEEE Sensors conference
Conference Dates
November 1-4, 2010
Conference Location
Waikoloa, HI
Conference Title
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors
The 9th Annual IEEE Conference on Sensors
Pub Type
Conferences
Download Paper
Keywords
Microhotplate, MEMS, BIST, Thermal efficiency
Citation
Created November 3, 2010, Updated February 19, 2017