| Author(s): |
Ricardo Decca; Vladimir A. Aksyuk; Daniel Lopez; |
| Title: |
Casimir force in micro and nano electro mechanical systems |
| Published: |
July 01, 2011 |
| Abstract: |
The book chapter covers current state of the art and prospects for using micro and nano electro mechanical systems for Casimir force measurement. |
| Citation: |
Casimir Physics |
| Publisher: |
Springer Science+Business Media LLC, New York, NY |
| Volume: |
834 |
| Keywords: |
Casimir force; MEMS NEMS sensors; mechanical sensing; AFM; |
| Research Areas: |
Microelectromechanical systems (MEMS), Nanoelectromechanical systems (NEMS), Quantum Physics |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
