| Author(s): |
Joseph L. Tedesco; Nadine E. Gergel-Hackett; Laurie A. Stephey; Christina A. Hacker; Curt A. Richter; |
| Title: |
Advanced Capacitance Metrology for Nanoscale Device Characterization |
| Published: |
April 29, 2010 |
| Abstract: |
|
| Conference: |
Tenth Annual IC Postdoctoral Research Fellowship Program Colloquium |
| Proceedings: |
Posters and Presentations (CD) |
| Pages: |
30 pp. |
| Location: |
McLean, VA |
| Dates: |
April 26-29, 2010 |
| Keywords: |
TiO2; Memristors; I-V; C-V; Nanoscale |
| Research Areas: |
Nanoelectronics and Nanoscale Electronics, Characterization, Nanometrology, and Nanoscale Measurements |
