Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publication Citation: Advanced Capacitance Metrology for Nanoscale Device Characterization

NIST Authors in Bold

Author(s): Joseph L. Tedesco; Nadine E. Gergel-Hackett; Laurie A. Stephey; Christina A. Hacker; Curt A. Richter;
Title: Advanced Capacitance Metrology for Nanoscale Device Characterization
Published: April 29, 2010
Abstract:
Conference: Tenth Annual IC Postdoctoral Research Fellowship Program Colloquium
Proceedings: Posters and Presentations (CD)
Pages: 30 pp.
Location: McLean, VA
Dates: April 26-29, 2010
Keywords: TiO2, Memristors, I-V, C-V, Nanoscale
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements, Nanoelectronics and Nanoscale Electronics