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Publication Citation: Advanced Capacitance Metrology for Nanoscale Device Characterization

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Author(s): Joseph L. Tedesco; Nadine E. Gergel-Hackett; Laurie A. Stephey; Christina A. Hacker; Curt A. Richter;
Title: Advanced Capacitance Metrology for Nanoscale Device Characterization
Published: April 29, 2010
Abstract:
Conference: Tenth Annual IC Postdoctoral Research Fellowship Program Colloquium
Proceedings: Posters and Presentations (CD)
Pages: 30 pp.
Location: McLean, VA
Dates: April 26-29, 2010
Keywords: TiO2; Memristors; I-V; C-V; Nanoscale
Research Areas: Nanoelectronics and Nanoscale Electronics, Characterization, Nanometrology, and Nanoscale Measurements