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Publication Citation: Valence and Conduction Band Offsets of a ZrO2/SiOxNy/n-Si CMOS Gate Stack: A Combined Photoemission and Inverse Photoemission Study

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Author(s): Safak Sayan; Robert A. Bartynski; Xin Zhao; Evgeni Gusev; David V. Vanderbilt; Mark Croft; M M. Banaszak-Holl; Eric Garfunkel;
Title: Valence and Conduction Band Offsets of a ZrO2/SiOxNy/n-Si CMOS Gate Stack: A Combined Photoemission and Inverse Photoemission Study
Published: April 02, 2004
Abstract:
Citation: Physica Status Solidi
Volume: 241
Issue: 10
Pages: 7 pp.
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (159KB)