| Author(s): |
Martin Foldyna; Thomas A. Germer; Brent Bergner; Ronald G. Dixson; |
| Title: |
Generalized ellipsometry of artificially designed line width roughness |
| Published: |
December 10, 2010 |
| Abstract: |
We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous coupled-wave methods in order to evaluate sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile. |
| Citation: |
Thin Solid Films |
| Volume: |
519 |
| Pages: |
pp. 2633 - 2636 |
| Keywords: |
biperiodic gratings; diffraction gratings; ellipsometry; line width roughness; Mueller matrix; multi-azimuth method; RCWA |
| Research Areas: |
Optics |
| PDF version: |
 Click here to retrieve PDF version of paper (579KB) |
