Avramov-Zamurovic1, S.
, Dagalakis, N.
, Lee, R.
, Kim, Y.
, Yoo, J.
and Yang, S.
(2010),
Embedded Capacitive Displacement Sensor for Nanopositioning Applications, Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906019
(Accessed April 24, 2024)
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Embedded Capacitive Displacement Sensor for Nanopositioning Applications
Published
Author(s)
Svetlana Avramov-Zamurovic1, , , , ,
Abstract
The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few hundred square micrometers are described. Analysis of several different designs was carried out using commercial simulation software. Results suggest a sensing resolution of 10 nm displacement. A sensor prototype was fabricated and tested.Proceedings Title
Conference on Precision Electromagnetic Measurements 2010
Conference Dates
June 13-18, 2010
Conference Location
Daejeon, KR
Pub Type
Conferences
Download Paper
Keywords
Capacitive, Sensor, Embedded, Nanopositioning
Citation
Created August 16, 2010, Updated October 12, 2021