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Publication Citation: Flatness measurements of thin, plane-parallel optics floated on a heavy liquid

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Author(s): Ulf Griesmann; Quandou Wang; Eric C. Benck; Jiyoung Chu; Jaewoong Sohn;
Title: Flatness measurements of thin, plane-parallel optics floated on a heavy liquid
Published: June 23, 2010
Abstract: no abstract
Conference: ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology
Proceedings: Proceedings ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology
Pages: pp. 62 - 66
Location: Ashville, NC
Dates: June 23-25, 2010
Keywords: interferometry, flatness metrology, heavy liquid
Research Areas: Optical Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)