| Author(s): |
Ulf Griesmann; Quandou Wang; Eric C. Benck; Jiyoung Chu; Jaewoong Sohn; |
| Title: |
Flatness measurements of thin, plane-parallel optics floated on a heavy liquid |
| Published: |
June 23, 2010 |
| Abstract: |
no abstract |
| Conference: |
ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology |
| Proceedings: |
Proceedings ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology |
| Pages: |
pp. 62 - 66 |
| Location: |
Ashville, NC |
| Dates: |
June 23-25, 2010 |
| Keywords: |
interferometry, flatness metrology, heavy liquid |
| Research Areas: |
Optical Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
