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Flatness measurements of thin, plane-parallel optics floated on a heavy liquid

Published

Author(s)

Ulf Griesmann, Quandou (. Wang, Eric C. Benck, Jiyoung Chu, Jaewoong Sohn

Abstract

no abstract
Proceedings Title
Proceedings ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology
Conference Dates
June 23-25, 2010
Conference Location
Ashville, NC
Conference Title
ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology

Keywords

interferometry, flatness metrology, heavy liquid

Citation

Griesmann, U. , Wang, Q. , Benck, E. , Chu, J. and Sohn, J. (2010), Flatness measurements of thin, plane-parallel optics floated on a heavy liquid, Proceedings ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Ashville, NC, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905895 (Accessed March 18, 2024)
Created June 23, 2010, Updated February 19, 2017