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Publication Citation: Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators

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Author(s): Juan C. Collado Gomez; Eduard Rocas; Jordi Mateu; Nathan D. Orloff; James C. Booth; Alberto Padillo; Juan Callaghan;
Title: Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators
Published: May 01, 2011
Abstract: This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material.
Citation: IEEE Transactions on Microwave Theory and Techniques
Volume: 59
Issue: 5
Pages: pp. 1207 - 1213
Keywords: Bulk Acoustic Wave, Film Bulk Acoustic Resonator, Nonlinearities, Intermodulation Distortion, Harmonic Generation, Nonlinear KLM, Nonlinear Stiffened Elasticity, Nonlinear Elastic Constant
Research Areas: Thin-Films, Nonlinear Optical Spectroscopy, Advanced Materials, Molecular Electronics