Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators

Published

May 1, 2011

Author(s)

Juan C. Collado Gomez, Eduard Rocas, Jordi Mateu, Nathan D. Orloff, James C. Booth, Alberto Padillo, Juan Callaghan

Abstract

This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material.

Citation

IEEE Transactions on Microwave Theory and Techniques

Volume

59

Issue

5

Pub Type

Journals

Keywords

Bulk Acoustic Wave, Film Bulk Acoustic Resonator, Nonlinearities, Intermodulation Distortion, Harmonic Generation, Nonlinear KLM, Nonlinear Stiffened Elasticity, Nonlinear Elastic Constant

Citation

Collado, J. , Rocas, E. , Mateu, J. , Orloff, N. , Booth, J. , Padillo, A. and Callaghan, J. (2011), Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators, IEEE Transactions on Microwave Theory and Techniques (Accessed April 19, 2024)