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|Author(s):||Juan C. Collado Gomez; Eduard Rocas; Jordi Mateu; Nathan D. Orloff; James C. Booth; Alberto Padillo; Juan Callaghan;|
|Title:||Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators|
|Published:||May 01, 2011|
|Abstract:||This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material.|
|Citation:||IEEE Transactions on Microwave Theory and Techniques|
|Pages:||pp. 1207 - 1213|
|Keywords:||Bulk Acoustic Wave, Film Bulk Acoustic Resonator, Nonlinearities, Intermodulation Distortion, Harmonic Generation, Nonlinear KLM, Nonlinear Stiffened Elasticity, Nonlinear Elastic Constant|
|Research Areas:||Molecular Electronics, Advanced Materials, Thin-Films, Nonlinear Optical Spectroscopy|