| Author(s): |
Juan C. Collado Gomez; Eduard Rocas; Jordi Mateu; Nathan D. Orloff; James C. Booth; Alberto Padillo; Juan Callaghan; |
| Title: |
Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators |
| Published: |
May 01, 2011 |
| Abstract: |
This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material. |
| Citation: |
IEEE Transactions on Microwave Theory and Techniques |
| Volume: |
59 |
| Issue: |
5 |
| Pages: |
pp. 1207 - 1213 |
| Keywords: |
Bulk Acoustic Wave, Film Bulk Acoustic Resonator, Nonlinearities, Intermodulation Distortion, Harmonic Generation, Nonlinear KLM, Nonlinear Stiffened Elasticity, Nonlinear Elastic Constant |
| Research Areas: |
Thin-Films, Nonlinear Optical Spectroscopy, Advanced Materials, Molecular Electronics |
