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Publication Citation: Demonstration of a Wafer-level Hall-Mobility Measurement Technique

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Author(s): Liangchun Yu; Kin P. Cheung; Vinayak Tilak; Greg Dunne; Kevin Matocha; Jason P. Campbell; John S. Suehle; Kuang Sheng;
Title: Demonstration of a Wafer-level Hall-Mobility Measurement Technique
Published: December 03, 2009
Abstract:
Pages: 30 pp.
Research Areas: Semiconductors, Characterization
PDF version: PDF Document Click here to retrieve PDF version of paper (88KB)