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Publication Citation: Scanning Probe Microscope Dimensional Metrology at NIST

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Author(s): John A. Kramar; Ronald G. Dixson; Ndubuisi G. Orji;
Title: Scanning Probe Microscope Dimensional Metrology at NIST
Published: December 21, 2010
Abstract: Scanning probe microscopy (SPM) dimensional metrology efforts at the U.S. National Institute of Standards and Technology are reviewed. The main SPM instruments for realizing the International System of Units (SI) are the Molecular Measuring Machine, the Calibrated Atomic Force Microscope, and the Critical Dimension Atomic Force Microscope. These are optimized for long-distance measurements, three-dimensional measurements over conventional SPM distances, and critical dimension or line width measurements respectively. 10 mm distances have been measured with relative standard uncertainty, u, of 1.5 x 10‹5; step heights at the 100 nm scale have been measured with relative u of 5 x 10‹3; and sub-micrometer line widths have been measured with u = 0.8 nm.
Citation: Measurement Science & Technology
Keywords: SPM; AFM; traceable dimensional metrology; nanometrology; uncertainty budget
Research Areas: Dimensional Metrology, Instrumentation, Atomic force microscopy (AFM), Scanning tunneling microscopy (STM), SI (Length)