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Publication Citation: Spatial Resolution of Electrical Measurements Performed with Scanning Probe Microscope as a Function of Tip Shape

NIST Authors in Bold

Author(s): Joseph J. Kopanski; Ilona Sitnitsky; Vincent LaBella;
Title: Spatial Resolution of Electrical Measurements Performed with Scanning Probe Microscope as a Function of Tip Shape
Published: March 15, 2010
Abstract:
Pages: 30 pp.
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements