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Publication Citation: NEW Scanning Electron Microscope Magnification Calibration Reference Material (RM) 8820

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Author(s): Michael T. Postek; Andras Vladar; William J. Keery; Michael Bishop; Benjamin Bunday; John Allgair;
Title: NEW Scanning Electron Microscope Magnification Calibration Reference Material (RM) 8820
Published: August 19, 2010
Abstract: Reference Material 8820 (RM 8820) is a new scanning electron microscope calibration reference material for nanotechnology and nanomanufacturingtion recently released by NIST. This standard was developed to be used primarily for X and Y scale (or magnification) calibrations of scanning electron microscopes from less than 10 times magnification to more than 300 000 times magnification, i.e., from about 10 mm to smaller than 300 nm range instrument field of view (FOV). This standard is identified as RM 8820. This is a very versatile standard, and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications, some of which will be described in this publication.
Conference: SPIE - Scanning
Proceedings: Proceedings of SPIE
Volume: 7729
Pages: pp. 7729OD - 1 - 7729OD - 11
Location: Monterey, CA
Dates: May 17-20, 2010
Keywords: standards; scanning electron microscope; traceability; magnification; field of view; scale; calibration
Research Areas: Manufacturing