| Author(s): |
Roy H. Geiss; Robert R. Keller; David T. Read; |
| Title: |
Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment |
| Published: |
January 01, 2010 |
| Abstract: |
We describe a new scanning electron microscope (SEM) method for obtaining and analyzing the crystallographic structure and orientation in nanoparticles and ultrathin films using conventional electron backscatter diffraction (EBSD) equipment. |
| Conference: |
Microscopy and Microanalysis 2010 |
| Proceedings: |
Microscopy and Microanalysis 2010 Proceedings |
| Pages: |
pp. 1742 - 1743 |
| Location: |
Portland, OR |
| Dates: |
August 1-5, 2010 |
| Keywords: |
EBSD; SEM; nanoparticles; thin films; transmission electron diffraction |
| Research Areas: |
Electron microscopy (EM, TEM, SEM, STEM), Nanostructures, Characterization, Nanometrology, and Nanoscale Measurements |
