NIST logo

Publication Citation: Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment

NIST Authors in Bold

Author(s): Roy H. Geiss; Robert R. Keller; David T. Read;
Title: Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment
Published: January 01, 2010
Abstract: We describe a new scanning electron microscope (SEM) method for obtaining and analyzing the crystallographic structure and orientation in nanoparticles and ultrathin films using conventional electron backscatter diffraction (EBSD) equipment.
Conference: Microscopy and Microanalysis 2010
Proceedings: Microscopy and Microanalysis 2010 Proceedings
Pages: pp. 1742 - 1743
Location: Portland, OR
Dates: August 1-5, 2010
Keywords: EBSD; SEM; nanoparticles; thin films; transmission electron diffraction
Research Areas: Electron microscopy (EM, TEM, SEM, STEM), Nanostructures, Characterization, Nanometrology, and Nanoscale Measurements