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Publication Citation: Reference Material (RM) 8820: A Versatile New NIST Standard for Nanometrology

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Author(s): Michael T. Postek; Andras Vladar; William J. Keery; Michael R. Bishop; Benjamin Bunday; John Allgair;
Title: Reference Material (RM) 8820: A Versatile New NIST Standard for Nanometrology
Published: July 19, 2010
Abstract: A new multipurpose instrument calibration standard has been released by NIST. This standard was developed to be used primarily for X and Y scale (or magnifi cation) calibrations of scanning electron microscopes from less than 10 times magnification to more than 300 000 times magnification i.e. from about 10 mm to smaller than 300 nm range instrument field of view (FOV). This standard is identifi ed as RM 8820. This is a very versatile standard and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications some of which will be described in this publication.
Proceedings: Proceedings of SPIE Advanced Lithography
Volume: 7638
Pages: pp. 1B 1 - 1B 11
Location: San Jose, CA
Dates: February 22-24, 2010
Keywords: standards; scanning electron microscope; traceability; magnification; field of view; scale; calibration
Research Areas: Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (4MB)