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Publication Citation: Strength distribution of single-crystal silicon theta-like specimens

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Author(s): Michael S. Gaither; Frank W. DelRio; Richard S. Gates; Edwin R. Fuller; Robert F. Cook;
Title: Strength distribution of single-crystal silicon theta-like specimens
Published: May 18, 2010
Abstract: A new test specimen has been developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths reached 3 GPa; fracture initiated at processing-induced flaws.
Citation: Journal of Microelectromechanical Systems
Volume: 63
Pages: pp. 422 - 425
Keywords: Finite element analysis (FEA), fracture strength, microelectromechanical systems (MEMS), single-crystal silicon, Weibull statistics
Research Areas: Properties, Ceramics, Materials Science
PDF version: PDF Document Click here to retrieve PDF version of paper (456KB)