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Publication Citation: Metrology of Molecular Devices made by Flip Chip Lamination

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Author(s): Christina A. Hacker; Mariona Coll Bau; Curt A. Richter;
Title: Metrology of Molecular Devices made by Flip Chip Lamination
Published: April 30, 2010
Abstract: Scaling of conventional electronics has continued unabated to dimensions approaching fundamental physical limits. As technology continues to evolve there are increasing demands to identify alternate routes of performing electrical functions. One potential alternate technology is molecular electronics. We have focused efforts on silicon-based molecular electronic devices and have developed a crucial understanding of the formation and characterization of molecular electronic devices. The fabrication and metrology of molecular based devices has progressed but remains challenging. This paper gives an overview of our technology highlighting formation of monolayers and metallization of the monolayers. Characterization of metal-monolayer-silicon structures will be discussed throughout.
Citation: ECS Transactions
Volume: 28
Issue: 2
Pages: pp. 549 - 562
Research Areas: Nanofabrication, Molecular Physics, Nanoelectronics and Nanoscale Electronics, Nanoimprint lithography, Nanochemistry, Molecular Spectroscopy
PDF version: PDF Document Click here to retrieve PDF version of paper (903KB)