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|Author(s):||Christina A. Hacker; Mariona Coll Bau; Curt A. Richter;|
|Title:||Metrology of Molecular Devices made by Flip Chip Lamination|
|Published:||April 30, 2010|
|Abstract:||Scaling of conventional electronics has continued unabated to dimensions approaching fundamental physical limits. As technology continues to evolve there are increasing demands to identify alternate routes of performing electrical functions. One potential alternate technology is molecular electronics. We have focused efforts on silicon-based molecular electronic devices and have developed a crucial understanding of the formation and characterization of molecular electronic devices. The fabrication and metrology of molecular based devices has progressed but remains challenging. This paper gives an overview of our technology highlighting formation of monolayers and metallization of the monolayers. Characterization of metal-monolayer-silicon structures will be discussed throughout.|
|Pages:||pp. 549 - 562|
|Research Areas:||Nanofabrication, Molecular Physics, Nanoelectronics and Nanoscale Electronics, Nanoimprint lithography, Nanochemistry, Molecular Spectroscopy|
|PDF version:||Click here to retrieve PDF version of paper (903KB)|