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Publication Citation: Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels

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Author(s): A. Rasmussen; Michael Gaitan; Laurie E. Locascio; Mona E. Zaghloul;
Title: Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels
Published: June 01, 2001
Abstract:
Citation: Journal of Microelectromechanical Systems
Volume: 10
Issue: 2
Pages: pp. 286 - 297
Research Areas: Microfluidics, Bioscience & Health, Chemistry