| Author(s): |
Stewart Smith; Martin McCallum; Andrew Hourd; J. T. Stevenson; Anthony J. Walton; Ronald G. Dixson; Richard A. Allen; James E. Potzick; Michael W. Cresswell; Ndubuisi G. Orji; |
| Title: |
Comparison of Measurement Techniques for Advanced Photomask Metrology |
| Published: |
March 24, 2008 |
| Abstract: |
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| Conference: |
2008 IEEE Conference on Microelectronics Test Structures |
| Proceedings: |
Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures |
| Pages: |
pp. 35 - 39 |
| Location: |
Edinburgh, -1 |
| Dates: |
March 24-27, 2008 |
| Research Areas: |
Critical Dimension and Overlay Metrology |
