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Publication Citation: Comparison of Measurement Techniques for Advanced Photomask Metrology

NIST Authors in Bold

Author(s): Stewart Smith; Martin McCallum; Andrew Hourd; J. T. Stevenson; Anthony J. Walton; Ronald G. Dixson; Richard A. Allen; James E. Potzick; Michael W. Cresswell; Ndubuisi G. Orji;
Title: Comparison of Measurement Techniques for Advanced Photomask Metrology
Published: March 24, 2008
Abstract:
Conference: 2008 IEEE Conference on Microelectronics Test Structures
Proceedings: Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures
Pages: pp. 35 - 39
Location: Edinburgh, -1
Dates: March 24-27, 2008
Research Areas: Critical Dimension and Overlay Metrology