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Publication Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2009

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Author(s): David G. Seiler; Alain C. Diebold; Robert McDonald; C. Michael Garner; Dan Herr; Rajinder P. Khosla; Erik M. Secula;
Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Published: October 05, 2009
Abstract:
Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Publisher: American Institute of Physics, Melville, NY
Volume: 1173
Pages: pp. 1 - 398
Research Areas: Semiconductors, Nanoelectronics and Nanoscale Electronics, Characterization, Nanometrology, and Nanoscale Measurements