| Author(s): |
David G. Seiler; Alain C. Diebold; Robert McDonald; C. Michael Garner; Dan Herr; Rajinder P. Khosla; Erik M. Secula; |
| Title: |
Frontiers of Characterization and Metrology for Nanoelectronics: 2009 |
| Published: |
October 05, 2009 |
| Abstract: |
|
| Citation: |
Frontiers of Characterization and Metrology for Nanoelectronics: 2009 |
| Publisher: |
American Institute of Physics, Melville, NY |
| Volume: |
1173 |
| Pages: |
pp. 1 - 398 |
| Research Areas: |
Semiconductors, Nanoelectronics and Nanoscale Electronics, Characterization, Nanometrology, and Nanoscale Measurements |
